Soft-defect inspection equipment based on DIC technique

Tsuneyuki Hagiwara

doi:10.1117/12.262837

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27 December 1996 Soft-defect inspection equipment based on DIC technique

Tsuneyuki Hagiwara

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Proceedings Volume 2884, 16th Annual BACUS Symposium on Photomask Technology and Management; (1996) https://doi.org/10.1117/12.262837
Event: 16th Annual BACUS Symposium on Photomask Technology and Management, 1996, Redwood City, CA, United States

Abstract

We have recently presented an operational principle based on the differential interference contrast (DIC) technique that we call `A-DIC method.' This method can suppress the circuit pattern images, and enhance the contrast between the images of the contamination and the defect-less circuit patterns. It uses both the transmission and reflection images. In this paper, we describe the other simpler method that we call `B- DIC' method.' This method requires only the reflection images and can be built in a confocal scanning microscope.

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Tsuneyuki Hagiwara "Soft-defect inspection equipment based on DIC technique", Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); https://doi.org/10.1117/12.262837

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