Translator Disclaimer
Paper
27 December 1996 Soft-defect inspection equipment based on DIC technique
Author Affiliations +
Abstract
We have recently presented an operational principle based on the differential interference contrast (DIC) technique that we call `A-DIC method.' This method can suppress the circuit pattern images, and enhance the contrast between the images of the contamination and the defect-less circuit patterns. It uses both the transmission and reflection images. In this paper, we describe the other simpler method that we call `B- DIC' method.' This method requires only the reflection images and can be built in a confocal scanning microscope.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tsuneyuki Hagiwara "Soft-defect inspection equipment based on DIC technique", Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); https://doi.org/10.1117/12.262837
PROCEEDINGS
11 PAGES


SHARE
Advertisement
Advertisement
Back to Top