Excimer laser crystallization of hydrogenated amorphous silicon

Yongbin Dai; Zhongyang Xu; Changan Wang; Shaoquiang Zhang; Chengwu An; Xingjiao Li; Xinheng Wan; Hui Ding

doi:10.1117/12.253126

30 September 1996 Excimer laser crystallization of hydrogenated amorphous silicon

Yongbin Dai, Zhongyang Xu, Changan Wang, Shaoquiang Zhang, Chengwu An, Xingjiao Li, Xinheng Wan, Hui Ding

Proceedings Volume 2888, Laser Processing of Materials and Industrial Applications; (1996) https://doi.org/10.1117/12.253126
Event: Photonics China '96, 1996, Beijing, China

Abstract

Hydrogenated amorphous silicon films have been crystallized by the irradiations of XeCl excimer laser. The crystallized films have been examined by the use of scanning electron microscopy (SEM), x-ray diffraction (XRD) and conductivity measurements to clarify their morphologies, structure and electrical properties. The results show that a high conductive super thin layer is formed by a single pulse laser irradiation with the energy density of 75mJ/cm². The conductivity increases quickly at laser energy density threshold which decreases when the hydrogen in a-Si:H films is removed by pre-annealing. During crystallization process, oxygen atoms from the air ambient have been introduced into the films and such an introducing process is hindered by the hydrogen eruption. When the oxygen content is high enough, the carrier-transport mechanism includes thermionic emission and thermionic field emission in the vicinity of room temperature, which is similar to semi-insulating polycrystalline silicon.

Citation Download Citation

Yongbin Dai, Zhongyang Xu, Changan Wang, Shaoquiang Zhang, Chengwu An, Xingjiao Li, Xinheng Wan, and Hui Ding "Excimer laser crystallization of hydrogenated amorphous silicon", Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); https://doi.org/10.1117/12.253126

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available