Paper
30 September 1996 YBa2Cu3O7-δ film deposited by laser ablation and its applications
Xinjian Yi, Zhihong Mai, Xing-Rong Zhao, Fang Qiao Zhou, Luqin Liu
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Abstract
We present the surface morphology of YBCO films deposited by laser ablation and optimization procedure of laser ablation to obtain epitaxial films with good surface quality. The optimization of the surface morphology of the films can be performed by carefully controlling the laser power to determine the growth rate and the homogeneity of films can be improved by rotating the ablating laser beam. These methods allow us to obtain high quality films with the transition width less than 1K, Tc of more than 90K and Jc more than 106A/cm2 at 77K. The optimized films were used to fabricate an 8-element high Tc superconducting microbridge with the size of 20 X 100 micrometers 2. The optical response characteristics of the microbolometer array wee investigated in the region of 8-14 micrometers . The average noise equivalent power was 3.1 X 10-12WHz-1/2, the average normalized detectivity was 1.44 X 109cmHz1/2W-1 and the nonuniformity of the average normalized detectivity was less than 10 percent.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xinjian Yi, Zhihong Mai, Xing-Rong Zhao, Fang Qiao Zhou, and Luqin Liu "YBa2Cu3O7-δ film deposited by laser ablation and its applications", Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); https://doi.org/10.1117/12.253123
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KEYWORDS
Laser ablation

Superconductors

Thin films

Microbolometers

Laser energy

Thin film deposition

Oxygen

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