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30 September 1996 kHz repetition rate operation of excimer laser
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Abstract
We have developed an excimer laser of compact coaxial type which the one line cross flow fan is only used. At 1 kHz repetitive operation, the average power of KrF laser is 56 watt. In this paper, the design parameters and CR characteristics are investigated for the attainment of the 1 kHz excimer laser. We have obtained the overall efficiency of 1.2% with KrF laser gas. At this time, CR and the variation of laser output are 2.97, +/- 9%, respectively. Laser gas volume and active volume are 10 liter, 1.8 (H) X 1.2 (W) X 30 (L) equals 64.8, respectively.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
HongJin Park and Choo Hie Lee "kHz repetition rate operation of excimer laser", Proc. SPIE 2889, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers, (30 September 1996); https://doi.org/10.1117/12.253253
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