Mechanism of anneal proton exchange to fabricate waveguides on LiNbO3

Shufen Chen; BingKun Qin

doi:10.1117/12.253182

30 September 1996 Mechanism of anneal proton exchange to fabricate waveguides on LiNbO₃

Shufen Chen, BingKun Qin

Proceedings Volume 2891, Integrated Optoelectronics; (1996) https://doi.org/10.1117/12.253182
Event: Photonics China '96, 1996, Beijing, China

Abstract

Anneal proton-exchanged planar waveguides on LiNbO₃ are investigated on aspect of crystallography and of optical properties. The strains and stress on crystalline lattices of LiNbO₃ due to proton exchange and annealing respective are measured by DDX (Double Diffraction of X-ray) and IR spectrometer. We study theoretically and experimentally the induced photoelastic and piezoelectric effects inside exchanged layer to explore mechanism of anneal. That demonstrates annealing technology being a efficient compensation permits to ameliorate the quality of waveguide and deduced optical propagating loss.

Citation Download Citation

Shufen Chen and BingKun Qin "Mechanism of anneal proton exchange to fabricate waveguides on LiNbO₃", Proc. SPIE 2891, Integrated Optoelectronics, (30 September 1996); https://doi.org/10.1117/12.253182

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