Mechanism of anneal proton exchange to fabricate waveguides on LiNbO3

Shufen Chen; BingKun Qin

doi:10.1117/12.253182

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30 September 1996 Mechanism of anneal proton exchange to fabricate waveguides on LiNbO₃

Shufen Chen, BingKun Qin

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Proceedings Volume 2891, Integrated Optoelectronics; (1996) https://doi.org/10.1117/12.253182
Event: Photonics China '96, 1996, Beijing, China

Abstract

Anneal proton-exchanged planar waveguides on LiNbO₃ are investigated on aspect of crystallography and of optical properties. The strains and stress on crystalline lattices of LiNbO₃ due to proton exchange and annealing respective are measured by DDX (Double Diffraction of X-ray) and IR spectrometer. We study theoretically and experimentally the induced photoelastic and piezoelectric effects inside exchanged layer to explore mechanism of anneal. That demonstrates annealing technology being a efficient compensation permits to ameliorate the quality of waveguide and deduced optical propagating loss.

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Shufen Chen and BingKun Qin "Mechanism of anneal proton exchange to fabricate waveguides on LiNbO₃", Proc. SPIE 2891, Integrated Optoelectronics, (30 September 1996); https://doi.org/10.1117/12.253182

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