Paper
25 September 1996 New type of multijunction thermopile IR detector
Tietun Sun, Li Hui Guo
Author Affiliations +
Abstract
A newly designed thin-film thermopile infrared detector, which as an absorption layer and a sensitive area on two sides are fabricated using integrated-circuit technology. The device uses a series-connected thermocouples array whose `hot' junction are supported on a thin Myler film of 1 - 3 micrometers thickness. By a special method of fasting the shadow mask, the thermopile with 48 Bi-Sb couples for 2 X 2 mm2 area produces a responsivity of 50 - 70 V/W and relaxation time of about 70 ms.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tietun Sun and Li Hui Guo "New type of multijunction thermopile IR detector", Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); https://doi.org/10.1117/12.252105
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors

Infrared detectors

Thin films

Absorption

Capacitance

Antimony

Composites

Back to Top