Devices for purity checking of process liquids

Olexander I. Bilyi; Vasyl B. Getman; Yaroslav P. Ferensovich; A. K. Shkolnyi

doi:10.1117/12.252155

24 September 1996 Devices for purity checking of process liquids

Olexander I. Bilyi, Vasyl B. Getman, Yaroslav P. Ferensovich, A. K. Shkolnyi

Proceedings Volume 2895, Fiber Optic Sensors V; (1996) https://doi.org/10.1117/12.252155
Event: Photonics China '96, 1996, Beijing, China

Abstract

Standard of technology of a number of works, as for example in production of microelectronics elements, is defined to a considerable extent by the degree of purity of acids, solvents, photoresist which are used. Concentration of the microparticles in process mediums has to be in range from 100 to 1000 particles per I. That is why particular attention is given for working out of methods and devices for checking the purity of liquid mediums. There is reported briefly about the devices, developed at Applied Physics Institute of Lviv Ivan Franko State University, which main principle of functioning is based on analyzing of light scattered by microparticles suspended in researched liquid in ranges of Mi-theory. Developed complex of the devices can be united in monitoring system intended for control of the content of microparticles in liquid mediums used in certain processes.

Citation Download Citation

Olexander I. Bilyi, Vasyl B. Getman, Yaroslav P. Ferensovich, and A. K. Shkolnyi "Devices for purity checking of process liquids", Proc. SPIE 2895, Fiber Optic Sensors V, (24 September 1996); https://doi.org/10.1117/12.252155

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