Automatic 360-deg profilometry of a 3D object using a shearing interferometer and virtual grating

Yong-Lin Zhang; Guixue Bu

doi:10.1117/12.253035

3 October 1996 Automatic 360-deg profilometry of a 3D object using a shearing interferometer and virtual grating

Yong-Lin Zhang, Guixue Bu

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253035
Event: Photonics China '96, 1996, Beijing, China

Abstract

Phase measuring technique has been widely used in optical precision inspection for its extraordinary advantage. We use the phase-measuring technique and design a practical instrument for measuring 360 degrees profile of 3D object. A novel method that can realize profile detection with higher speed and lower cost is proposed. Phase unwrapping algorithm based on the second order differentiation is developed. A complete 3D shape is reconstructed from a series of line- section profiles corresponding to discrete angular position of the object. The profile-jointing procedure is only related with two fixed parameters and coordination transformation.

Citation Download Citation

Yong-Lin Zhang and Guixue Bu "Automatic 360-deg profilometry of a 3D object using a shearing interferometer and virtual grating", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253035

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