Paper
3 October 1996 Bidirectional shearing interferometer for collimation testing
Zhiwen Yang, Wei An
Author Affiliations +
Abstract
This paper describes the principle and the optical arrangement of three kinds of bidirectional shearing interferometer for collimation testing. The interference fringes expression formula and the collimation testing accuracy are also given in this paper. The results obtained show that the testing accuracy is higher.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhiwen Yang and Wei An "Bidirectional shearing interferometer for collimation testing", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253074
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Collimation

Shearing interferometers

Moire patterns

Mirrors

Interferometers

Ronchi rulings

Wavefronts

Back to Top