Three-dimensional profile measurement of fine objects by phase-shifting shadow moire interferometry

Seung-Woo Kim; Yi-Bae Choi; Jung-Taek Oh

doi:10.1117/12.263330

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20 January 1997 Three-dimensional profile measurement of fine objects by phase-shifting shadow moire interferometry

Seung-Woo Kim, Yi-Bae Choi, Jung-Taek Oh

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Proceedings Volume 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II; (1997) https://doi.org/10.1117/12.263330
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

An industrial application of phase-shifting shadow moire interferometry for automatic 3D inspection of fine objects is presented. A line grating is used to generate shadow type moire fringes whose relative phases are readily determined by implementing the principle of phase shifting so that the surface height of the object can be measured. A special phase-measuring algorithm, named the A-bucket algorithm, is used which can precisely computes the relative phases even though there exists a significant level of errors in phase shifting due to miscalibration and external vibration. Finally, several experimental cases are discussed to demonstrate that a measuring accuracy in the order of 0.001 mm can practically be achieved.

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Seung-Woo Kim, Yi-Bae Choi, and Jung-Taek Oh "Three-dimensional profile measurement of fine objects by phase-shifting shadow moire interferometry", Proc. SPIE 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II, (20 January 1997); https://doi.org/10.1117/12.263330

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