Applications of optical fiber techniques to optical metrology

Nai-Keng Bao; Guan-chang Jin; Po Sheun Chung

doi:10.1117/12.269821

20 March 1997 Applications of optical fiber techniques to optical metrology

Nai-Keng Bao, Guan-chang Jin, Po Sheun Chung

Proceedings Volume 2921, International Conference on Experimental Mechanics: Advances and Applications; (1997) https://doi.org/10.1117/12.269821
Event: International Conference on Experimental Mechanics: Advances and Applications, 1996, Singapore, Singapore

Abstract

Optical fiber is a powerful element in optical communication and other optical techniques. A novel optical metrology based on optical fiber techniques is presented in this paper. The advantages of this technique provide not only the mini-type apparatus but also a simple phase-shifting method to increase the measuring accuracy. A high birefringence fiber with a beat length of 1.2 mm for phase-shifting technique is introduced. The experimental set-up and the technique principle, details will be discussed. Several application examples of optical metrology based on the optical fiber set-up are presented. The application areas include displacement measurement, 3D shape measurement and nondestructive testing. One of the important features of this advanced apparatus is its ability to apply in small object measurements for the electronic industry.

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Nai-Keng Bao, Guan-chang Jin, and Po Sheun Chung "Applications of optical fiber techniques to optical metrology", Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); https://doi.org/10.1117/12.269821

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KEYWORDS

Optical fibers

Optical metrology

Polarization

3D metrology

Modulators

Nondestructive evaluation

Birefringence

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