High-sensitivity moire grating fabrication

Ling Shi; Fulong Dai; XinGeng Zhou; Werner Daum

doi:10.1117/12.269870

20 March 1997 High-sensitivity moire grating fabrication

Ling Shi, Fulong Dai, XinGeng Zhou, Werner Daum

Proceedings Volume 2921, International Conference on Experimental Mechanics: Advances and Applications; (1997) https://doi.org/10.1117/12.269870
Event: International Conference on Experimental Mechanics: Advances and Applications, 1996, Singapore, Singapore

Abstract

Gratings with high sensitivity and high frequency are in big demand in that they are used both as the specimen deformation sensors in the superlattice method and moire interferometry, and as the calibration elements in the field of optoelectronics and matter-wave diffractions. In this paper, photoresist moire gratings with the frequency of up to 6000 lines/mm are fabricated using the coherent light source of argon laser with the wavelength of 457.9 nm. Two techniques are presented. They are: grating fabrication in the refractive medium, and grating frequency multiplication technique. Detailed technologies are given.

Citation Download Citation

Ling Shi, Fulong Dai, XinGeng Zhou, and Werner Daum "High-sensitivity moire grating fabrication", Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); https://doi.org/10.1117/12.269870

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