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26 November 1996 GaAs/AlGaAs-based Mach-Zehnder interferometer as integrated optical immunosensor
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Abstract
System miniaturization is a key issue in further development of integrated optical sensors. We present an integrated optical GaAs/AlGaAs-based Mach-Zehnder interferometer with a 2 mm long TiO2 on SiO2 embedded waveguide sensor pad and its performance as a bioaffinity sensor. Preliminary experiments to evaluate the performance of our Mach-Zehnder interferometer device were done by studying the binding of immunoglobulin (IgG) to protein A. The current resolution limit of IgG surface coverage is 3 pg/mm2, corresponding to less than 1/1600 of a saturated IgG monolayer. Since the design of the basic GaAs/AlGaAs waveguide structure is fully compatible with monolithic integration of lasers, modulators and detectors, improved performance can be expected from integration of these optoelectronic components on the same chip.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernd Maisenhoelder, Hans P. Zappe, Rino E. Kunz, Peter Riel, Michael Moser, and Gert L. Duveneck "GaAs/AlGaAs-based Mach-Zehnder interferometer as integrated optical immunosensor", Proc. SPIE 2928, Biomedical Systems and Technologies, (26 November 1996); https://doi.org/10.1117/12.259972
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