Paper
13 May 1997 Effects of thin film production parameters on laser-induced damage in optical coatings
Qian Zhao, Zhengxiu Fan, Hong Qiu, Yue Liu, ZhiJiang Wang
Author Affiliations +
Abstract
Laser induced damage in optical coatings is a complicated problem, which is attributed to a lot of factors, including environment parameters, laser parameters and thin film production parameters. Among the three factors, production parameters interest us most. We produce a series of samples with different roughness levels of the substrates, thin film material and vacuum environment within the chamber, etc. Using 1.06 micrometers Nd:YAG laser as our test laser, we make 1- on-1 laser damage test to these samples. Some interesting phenomena are found. We calculate the laser induced local heating within the thin film multilayers, and make analysis to the experimental phenomena. Conclusions are given.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qian Zhao, Zhengxiu Fan, Hong Qiu, Yue Liu, and ZhiJiang Wang "Effects of thin film production parameters on laser-induced damage in optical coatings", Proc. SPIE 2966, Laser-Induced Damage in Optical Materials: 1996, (13 May 1997); https://doi.org/10.1117/12.274279
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Cited by 2 scholarly publications.
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KEYWORDS
Laser induced damage

Optical coatings

Thin films

Absorption

Thin film coatings

Polishing

Multilayers

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