Properties of unstable donors generated in Si during laser irradiation

Juris Blums; Arthur Medvids

doi:10.1117/12.266823

6 February 1997 Properties of unstable donors generated in Si during laser irradiation

Juris Blums, Arthur Medvids

Proceedings Volume 2968, Optical Organic and Semiconductor Inorganic Materials; (1997) https://doi.org/10.1117/12.266823
Event: International Conference on Advanced Optical Materials and Devices, 1996, Riga, Latvia

Abstract

The generation of unstable at room temperature centers in boron-doped Si during laser annealing are under investigation. It is shown, that the generation of two kinds of unstable centers with different recombination time constants during the laser annealing takes place. Through an investigation of dependence of the recombination time constants on temperature the activation energies of these donors are determined: E_F equals 0.8 - 0.9 eV and E₂ equals 1.4 - 1.5 eV. It is detected, that recombination time constants of centers depend on boron and oxygen atoms concentrations in laser-annealed region -- recombination time constants of both kinds of centers decrease with increase of both boron and oxygen concentrations in silicon. It is shown, that the generation of these unstable donors does not occur during the laser annealing of boron-doped silicon with basic frequency of Q-switched Nd:YAG-laser (wavelength 1.06 micrometer). The model of generation mechanism of the donors is proposed taking into account dependence of recrystallization velocity during pulsed laser annealing on absorption coefficient of radiation and a great difference in absorption coefficients of basic (k₁ equals 15 cm^-1) and double (k₂ equals 10⁴ cm^-1) frequencies of Nd:YAG-laser radiation.

Citation Download Citation

Juris Blums and Arthur Medvids "Properties of unstable donors generated in Si during laser irradiation", Proc. SPIE 2968, Optical Organic and Semiconductor Inorganic Materials, (6 February 1997); https://doi.org/10.1117/12.266823

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