Destruction of silicon and copper surface under pulsed and pulse periodic action of YAG:Nd laser

Alexander F. Banishev; Elena A. Baliikina

doi:10.1117/12.270025

27 March 1997 Destruction of silicon and copper surface under pulsed and pulse periodic action of YAG:Nd laser

Alexander F. Banishev, Elena A. Baliikina

Proceedings Volume 2993, Lasers as Tools for Manufacturing II; (1997) https://doi.org/10.1117/12.270025
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The paper presents the results of the study of silicon and copper surface destruction under pulsed and pulse-periodic action of YAG:Nd laser radiation. The anomalies have been discovered in the probe beam of He-Ne laser scattered from the silicon surface under its irradiation with a series of YAG:Nd laser pulses at I less than I_melt. (where I_melt. is the surface melting threshold). These anomalies are supposedly related to formation of surface layer saturated with defects.

Citation Download Citation

Alexander F. Banishev and Elena A. Baliikina "Destruction of silicon and copper surface under pulsed and pulse periodic action of YAG:Nd laser", Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); https://doi.org/10.1117/12.270025

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