Organoaluminophosphate sol-gel silica glass thin films for integrated optics

Tahar Touam; Galina Milova; Z. Saddiki; M. Amir Fardad; Mark P. Andrews; Salim K. Juma; Jacek Chrostowski; S. Iraj Najafi

doi:10.1117/12.264135

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23 January 1997 Organoaluminophosphate sol-gel silica glass thin films for integrated optics

Tahar Touam, Galina Milova, Z. Saddiki, M. Amir Fardad, Mark P. Andrews, Salim K. Juma, Jacek Chrostowski, S. Iraj Najafi

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Proceedings Volume 2997, Integrated Optics Devices: Potential for Commercialization; (1997) https://doi.org/10.1117/12.264135
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We report on the fabrication and characterization of waveguide thin films on silicon by ultraviolet light imprinting in a new photosensitive, organically modified aluminophosphate sol-gel silica glass prepared by a one-step dip-coating process. Appropriate combinations of ultraviolet light exposure time, sol-gel film thickness and postbake parameters produce waveguides suitable for optical telecommunication applications.

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Tahar Touam, Galina Milova, Z. Saddiki, M. Amir Fardad, Mark P. Andrews, Salim K. Juma, Jacek Chrostowski, and S. Iraj Najafi "Organoaluminophosphate sol-gel silica glass thin films for integrated optics", Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); https://doi.org/10.1117/12.264135

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