Sensitive absorption spectroscopy using tunable semiconductor lasers

Edward A. Whittaker; Khosrow Namjou-Khaless; Simin Cai

doi:10.1117/12.263485

10 January 1997 Sensitive absorption spectroscopy using tunable semiconductor lasers

Edward A. Whittaker, Khosrow Namjou-Khaless, Simin Cai

Proceedings Volume 3000, Laser Diode and LED Applications III; (1997) https://doi.org/10.1117/12.263485
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

As performance levels for sophisticated electronic materials and device processing increase so to does the demand for versatile methods for on-line real time sensing of many process parameters. To that end we have developed a series of tunable semiconductor laser spectrometers for use in detection schemes of gas phase chemical species via infrared absorption spectroscopy. We report here on characterization of dual modulation schemes for enhanced sensitivity, interference fringe free, absorption spectroscopy data.

Citation Download Citation

Edward A. Whittaker, Khosrow Namjou-Khaless, and Simin Cai "Sensitive absorption spectroscopy using tunable semiconductor lasers", Proc. SPIE 3000, Laser Diode and LED Applications III, (10 January 1997); https://doi.org/10.1117/12.263485

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