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11 April 1997 Optical displacement measurement using a monolithic Michelson interferometer
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Contactless optical displacement measurement has the potential for a variety of industrial and scientific applications. For highly accurate displacement measurements at distances below 1 m, interferometric methods are preferred over most other methods. This is mainly because of the good resolution and the possibility of doing the measurements in real-time. Furthermore, the use of direct bandgap semiconductor materials also enables the fabrication of a compact interferometer-based device which unites all necessary components, including the light emitter, on a single chip. In this paper, a monolithically integrated optical displacement sensor fabricated in the GaAs/AlGaAs material system is reported. This single chip microsystem is configured as a double Michelson interferometer and comprises a distributed Bragg reflector laser, photodetectors, phase shifters and waveguide couplers. In the course of this paper, we will also briefly discuss possible scientific and industrial applications of such devices.
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Daniel Hofstetter and Hans P. Zappe "Optical displacement measurement using a monolithic Michelson interferometer", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997);

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