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15 April 1997 Application and characterization of combined SNOM/SFM cantilever probes
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A combined SNOM/SFM aperture probe is presented which is based on a conventional scanning force microscopy cantilever. Probe fabrication was performed in a batch process which allows to get reproducible mechanical and optical properties. For SNOM applications a tip is integrated at the very end of the cantilever which consists of a hollow metal pyramid with a miniaturized aperture of about 60 nm. To select the appropriate tip material the transmissivity of different metals were investigated in the visible range. The SNOM/SFM probes were characterized both mechanically and optically, e.g. the transmission of apertures is measured as a function of their size. To determined the lateral resolution in the optical transmission mode measurements on test samples are shown. Additionally, a novel probe design is introduced where the geometry of the single aperture tip is altered to obtain a double aperture tip.
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Stephfan Werner, Stefan Muenster, Sven Heisig, Christopher Mihalcea, Wenzel Scholz, and Egbert Oesterschulze "Application and characterization of combined SNOM/SFM cantilever probes", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997);

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