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15 April 1997 Focusing properties of a micromachined electron lens
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Abstract
The probe forming capability of a microfabricated silicon electrostatic electron lens is under investigation. The lens measures 7 mm by 9 mm by 1.64 mm and consists of three silicon electrodes separated by Pyrex optical fibers. A test structure was designed to house the micromachined lens and a commercially available electron emitter as well as deflectors and an electron detector. Images of a 1000 mesh gold TEM wire grid at a working distance of 4 mm are being obtained at magnifications greater than 10,000 X. Data from the images will be analyzed to estimate the quality of the electron beam.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David A. Crewe, Marvin M. Ruffin, and Alan D. Feinerman "Focusing properties of a micromachined electron lens", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271218
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