Translator Disclaimer
Paper
3 April 1997 Real-time machine vision for semiconductor manufacturing
Author Affiliations +
Proceedings Volume 3028, Real-Time Imaging II; (1997) https://doi.org/10.1117/12.270350
Event: Electronic Imaging '97, 1997, San Jose, CA, United States
Abstract
Real-time vision has many applications in the area of semiconductor manufacturing. Typical processes use machine vision for alignment, inspection, measurement, process control, and quality control. This paper describes one application where machine vision is used in conjunction with a diffraction based optical technique to measure linewidth for use in critical dimension control.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edward T. Polkowski "Real-time machine vision for semiconductor manufacturing", Proc. SPIE 3028, Real-Time Imaging II, (3 April 1997); https://doi.org/10.1117/12.270350
PROCEEDINGS
5 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Accuracy in optical overlay metrology
Proceedings of SPIE (March 24 2016)
Vision Algorithms For VLSI Wafer Probing
Proceedings of SPIE (February 01 1990)
Inspection And Automation Systems For Test And Assembly
Proceedings of SPIE (December 04 1984)
Physical theory of Ronchi-grams unequal strip-widths rulings
Proceedings of SPIE (October 21 2004)

Back to Top