You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
3 April 1997Real-time machine vision for semiconductor manufacturing
Real-time vision has many applications in the area of semiconductor manufacturing. Typical processes use machine vision for alignment, inspection, measurement, process control, and quality control. This paper describes one application where machine vision is used in conjunction with a diffraction based optical technique to measure linewidth for use in critical dimension control.
The alert did not successfully save. Please try again later.
Edward T. Polkowski, "Real-time machine vision for semiconductor manufacturing," Proc. SPIE 3028, Real-Time Imaging II, (3 April 1997); https://doi.org/10.1117/12.270350