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19 June 1997 TiNi shape-memory alloy actuated micropump with fluid isolation
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The shape memory alloy (SMA) titanium-nickel (TiNi) is used in thin film form as the basis of actuation for a reciprocating micropump. A novel configuration comprising a TiNi actuator and a polyimide diaphragm is used to perform cyclic motion while utilizing the one way shape memory effect (OWSME). The polyimide diaphragm acts as a spring to provide the bias force required for cyclic motion using the OWSME of TiNi. It also isolates the TiNi from the liquid pumped. An electrical drive signal is passed directly through the TiNi thin film. The current results in joule heating and hence a phase transformation in the SMA causing the shape memory effect. The cyclic motion of this actuator configuration cycles the volume of the pump chamber. Doubly fixed polyimide check valves ensure unidirectional flow through the pump chamber, resulting in pumping. The pump was tested with filtered DI water.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William L. Benard, Harold Kahn, and Michael A. Huff "TiNi shape-memory alloy actuated micropump with fluid isolation", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997);


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