Power measurements of exposure radiation using thin metal film sensors

Harish M. Manohara; Kevin J. Morris; J. Michael Klopf; Gina M. Calderon; Jason Babin; Olga Vladimirsky; Yuli Vladimirsky

doi:10.1117/12.275791

7 July 1997 Power measurements of exposure radiation using thin metal film sensors

Harish M. Manohara, Kevin J. Morris, J. Michael Klopf, Gina M. Calderon, Jason Babin, Olga Vladimirsky, Yuli Vladimirsky

Author Affiliations +

Proceedings Volume 3048, Emerging Lithographic Technologies; (1997) https://doi.org/10.1117/12.275791
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

An exposure radiation power measurement technique utilizing thin gold film thermal sensors has been presented. The sensory system of the power meter (or calorimeter) consists of three interlaced serpentine resistors covering an area of 6 cm by 0.4 cm, functioning as a thermal sensor, a heater and a shielding electrode. The measurement principle is based on recording the change in resistance of the sensor due to heating under radiation and internal calibration. The interlaced gold sensors were fabricated using optical lithography on a 100 mm diameter silicon wafer. The power measurements have been performed at CAMD/LSU 1.3 - 1.5 GeV synchrotron source, on a 'white light' beamline (E_max approximately 4 keV). The measurement results agree with calculations within approximately 4%. The relaxation time of the calorimeter response was 90 seconds in vacuum (10^-4Torr) and 18 seconds in 25 Torr helium. The power from a UV lamp of an ORIEL optical exposure station was measured using an interlaced thermal sensor and a commercial calorimeter. The results agree within 2%.

Citation Download Citation

Harish M. Manohara, Kevin J. Morris, J. Michael Klopf, Gina M. Calderon, Jason Babin, Olga Vladimirsky, and Yuli Vladimirsky "Power measurements of exposure radiation using thin metal film sensors", Proc. SPIE 3048, Emerging Lithographic Technologies, (7 July 1997); https://doi.org/10.1117/12.275791

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