Model-based optical proximity correction including effects of photoresist processes

Jiangwei Li; Douglas A. Bernard; Juan C. Rey; Victor V. Boksha

doi:10.1117/12.276057

7 July 1997 Model-based optical proximity correction including effects of photoresist processes

Jiangwei Li, Douglas A. Bernard, Juan C. Rey, Victor V. Boksha

Proceedings Volume 3051, Optical Microlithography X; (1997) https://doi.org/10.1117/12.276057
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

In this paper, a new automatic model-based Optical Proximity Correction (OPC) approach is reported. It combines a fast aerial image solver and a physically based empirical resist model. The fast aerial image calculation is achieved by using the algorithm of the coherent decomposition of the partially coherent optical systems. The first order resist model of Brunner is extended to accommodate intensity log- slope variations. The modified model can be calibrated by either experimental data or resist process simulations. In this paper, resist simulations using Depict are selected to fit the model parameters. Defocus effects in OPC are also discussed. A new scheme that combines edge biasing and the addition of sub-resolution features is shown to greatly improve the process latitude.

Citation Download Citation

Jiangwei Li, Douglas A. Bernard, Juan C. Rey, and Victor V. Boksha "Model-based optical proximity correction including effects of photoresist processes", Proc. SPIE 3051, Optical Microlithography X, (7 July 1997); https://doi.org/10.1117/12.276057

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available