Optical proximity correction in DRAM cell using a new statistical methodology

Akio Misaka; Akihiko Goda; Koji Matsuoka; Hiroyuki Umimoto; Shinji Odanaka

doi:10.1117/12.275994

7 July 1997 Optical proximity correction in DRAM cell using a new statistical methodology

Akio Misaka, Akihiko Goda, Koji Matsuoka, Hiroyuki Umimoto, Shinji Odanaka

Proceedings Volume 3051, Optical Microlithography X; (1997) https://doi.org/10.1117/12.275994
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

An optical proximity correction algorithm based on statistical methodology is developed. The response surface function (RSF) for the CD in the lithographic process is extended by introducing variables for the mask pattern size. The values of process parameters and mask pattern size are concurrently optimized by using the RSF. This methodology allows design for manufacturability, considering error distributions of process parameters such as focus position and exposure dose. The algorithm is applied to a DRAM cell pattern. The result indicates the annular illumination with larger coherency than that of the conventional illumination improve the CD limited yield.

Citation Download Citation

Akio Misaka, Akihiko Goda, Koji Matsuoka, Hiroyuki Umimoto, and Shinji Odanaka "Optical proximity correction in DRAM cell using a new statistical methodology", Proc. SPIE 3051, Optical Microlithography X, (7 July 1997); https://doi.org/10.1117/12.275994

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