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7 July 1997 Stepper matching for optimum line performance
Tom Dooly, Ying-Ying Yang
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Proceedings Volume 3051, Optical Microlithography X; (1997) https://doi.org/10.1117/12.276028
Event: Microlithography '97, 1997, Santa Clara, CA, United States
Abstract
A method of stepper set-up, maintenance, and tracking is described that is intended to match the overlay performance of multiple-model steppers in a multiple technology manufacturing line. The philosophy of this method is to determine, track and control systematic errors associated with overlay, and to measure and characterize the non- systematic or random errors to determine the base line performance capability of the stepper tool set. A description of the stepper set-up procedure, the data collection and analysis routines, and data from these procedures will be presented. A matrix of baseline stepper- to-stepper performance will be shown, along with additional analysis of non-systematic errors that were found to be not very `random'. An example of line performance after stepper set-up will be shown, along with a discussion on differences between set-up analysis and production lot measurements.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Tom Dooly and Ying-Ying Yang "Stepper matching for optimum line performance", Proc. SPIE 3051, Optical Microlithography X, (7 July 1997); https://doi.org/10.1117/12.276028
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KEYWORDS
Error analysis
Overlay metrology
Control systems
Manufacturing
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