Paper
27 December 1996 Laser-based system for surface quality inspection
George Agapiou, C. Kassiouras, Alexander A. Serafetinides
Author Affiliations +
Proceedings Volume 3052, Ninth International School on Quantum Electronics: Lasers--Physics and Applications; (1996) https://doi.org/10.1117/12.262959
Event: Ninth International School on Quantum Electronics: Lasers: Physics and Applications, 1996, Varna, Bulgaria
Abstract
An optical inspection system has been developed to detect the surface quality of flat surfaces. The system monitors surface quality by using a laser scanner sensor which detects spatial differences in the intensity level of the light scattered in various directions. An image processing algorithm has been developed to classify the surface quality either by measuring the average of the intensity difference or by counting the number of defects when a more detailed analysis is necessary.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George Agapiou, C. Kassiouras, and Alexander A. Serafetinides "Laser-based system for surface quality inspection", Proc. SPIE 3052, Ninth International School on Quantum Electronics: Lasers--Physics and Applications, (27 December 1996); https://doi.org/10.1117/12.262959
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KEYWORDS
Photodiodes

Inspection

Light scattering

Quality systems

Algorithm development

Image processing

Mirrors

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