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13 August 1997 Corrugated quantum well infrared photodetectors
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Abstract
A new light coupling geometry for quantum well infrared photodetectors (QWIP), which is referred as the corrugated- QWIP or the C-QWIP, has been demonstrated. The coupling scheme is based on the total internal reflection at a number of slanted sidewalls created within a detector pixel. The structure was found to be able to couple normal incident light efficiently into the detector with concomitant reduction in the dark current. For a C-QWIP with thinned substrate, the background photocurrent to the dark current ratio is improved by a factor of 4.9 compared with the edge coupling. The coupling scheme does not show significant wavelength and size dependence, and is therefore suitable for multi-color or high resolution thermal imaging. With these characteristics, a C- QWIP behaves as a detector with normal incident absorption. Because of its simple fabrication procedures, the manufacturability of the detector arrays can be greatly improved.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. J. Chen, Kwong-Kit Choi, Wayne H. Chang, and Daniel C. Tsui "Corrugated quantum well infrared photodetectors", Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); https://doi.org/10.1117/12.280391
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