Stability of a 1 kW-excimer laser with long optical pulses

John C.M. Timmermans; Thomas Hofmann; Frederik A. van Goor; Wilhelmus J. Witteman

doi:10.1117/12.270207

4 April 1997 Stability of a 1-kW excimer laser with long optical pulses

John C.M. Timmermans, Thomas Hofmann, Frederik A. van Goor, Wilhelmus J. Witteman

Proceedings Volume 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1997) https://doi.org/10.1117/12.270207
Event: XI International Symposium on Gas Flow and Chemical Lasers and High Power Laser Conference, 1996, Edinburgh, United Kingdom

Abstract

For high repetition operation of excimer-lasers care has to be taken of the changing performance of the electrical circuit, gas dynamic effects and contamination of the gas mixture to avoid deterioration of the laser performance. The parameters that influence the stability of the discharge are discussed. With the proper settings 1 kW of average power can be reached.

Citation Download Citation

John C.M. Timmermans, Thomas Hofmann, Frederik A. van Goor, and Wilhelmus J. Witteman "Stability of a 1-kW excimer laser with long optical pulses", Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); https://doi.org/10.1117/12.270207

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