Direct writing of nano patterns with nearfield enhanced laser radiation

Johann Jersch; Frank Demming; L. J. Hildenhagen; Klaus Dickmann

doi:10.1117/12.281081

18 August 1997 Direct writing of nano patterns with near-field enhanced laser radiation

Johann Jersch, Frank Demming, L. J. Hildenhagen, Klaus Dickmann

Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.281081
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Nano processing is a cornerstone technology for several future oriented applications, as for example in the fields of high density data storage, nano matching of X-ray fresnel optics, micro electronics, micro robotics and biomolecularic. However, as well known, processing in the nanometer range with laser radiation is not possible by lenses or mirrors due to diffraction limitation. Recent research work has shown, that `focusing' of laser radiation down to a few nanometer can be obtained by using lasers in combination with nearfield technology (e.g. SNOM--Scanning Nearfield Optical Microscopy, SPM--Scanning Probe Microscopy). Lateral externally illumination of SPM probe tips with laser radiation can cause tremendous intensity enhancement in the nearfield underneath the tip. A brief theoretical consideration of this effect and results of calculations based on boundary element method is done. This kind of field energy concentration we named FOLANT-technique (FOcusing of LAserradiation in the Nearfield of a Tip). The interaction area with nanometer scale can be applied for material processing even down to atomic dimensions. Using FOLANT-technique hillocks, pits and grooves with lateral dimensions down to 10 nm have been obtained on conductive substrates as well as on dielectric materials (for example polycarbonate). Our experiments have shown, that FOLANT- technique is a promising tool for various applications in nanometer material processing.

Citation Download Citation

Johann Jersch, Frank Demming, L. J. Hildenhagen, and Klaus Dickmann "Direct writing of nano patterns with near-field enhanced laser radiation", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); https://doi.org/10.1117/12.281081

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available