Paper
18 August 1997 Microstructuring of metal surfaces without burr by means of a combined oxidation-sublimation process in the focus of a laser beam
Friedrich G. Lupp, Christoph A. O. Hamann
Author Affiliations +
Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.281096
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany
Abstract
Hydrodynamical bearings for X-ray tubes made of molybdenum offer several advantages over ball bearings, one being the reduced noise, another the extended life time. A process has been developed to texture a molybdenum surface with a laser beam without generating blur. In order to avoid melt which may cause burr the material is evaporate via its oxides. A two step oxidation followed by the sublimation has been identified as governing process. The flat bottom of the groove is explained by the limited diffusion velocity of the oxygen and the reaction products. Incorporating a process control an accuracy of +/- 3 micrometers at groove depth of 20 micrometers was realized.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Friedrich G. Lupp and Christoph A. O. Hamann "Microstructuring of metal surfaces without burr by means of a combined oxidation-sublimation process in the focus of a laser beam", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); https://doi.org/10.1117/12.281096
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KEYWORDS
Molybdenum

Oxides

Oxidation

Metals

Combustion

Diodes

Solids

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