Microellipsometric surface measurement

Jochen Doberitzsch; Wolfgang Holzapfel; Ulrich Neuschaefer-Rube

doi:10.1117/12.281152

17 September 1997 Microellipsometric surface measurement

Jochen Doberitzsch, Wolfgang Holzapfel, Ulrich Neuschaefer-Rube

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281152
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Surface measurement is an important tool for quality control In our contribution we describe a novel application of reflection ellipsometry to profile measurement and material detection. The ellipsometric parameters (Delta) and (Psi) are measured by using a PSA-ellipsometer arrangement and a 4- zone-intensity-ellipsometric algorithm. To achieve a high lateral resolution we focus the laser beam on the surface through a microscope objective with high numerical aperture. The spot diameter is in the order to 1 micrometers . The focus adjustment is carried out by an integrated autofocus system. From the ellipsometric parameters we conclude to the refractive index of the local surface material and the local surface gradients. The height profile is calculated by an integrating and filtering algorithm. The material is ascertained form the refractive index. The feasibility of our novel microellipsometric measurement system is demonstrated by several tests. Measurements of material transitions and the height profile of a glass surface standard are presented.

Citation Download Citation

Jochen Doberitzsch, Wolfgang Holzapfel, and Ulrich Neuschaefer-Rube "Microellipsometric surface measurement", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281152

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Refractive index

Objectives

Sensors

Glasses

Microscopes

Beam splitters

Reflection

Show All Keywords

Keywords/Phrases

Search In:

Publication Years