Reflection and transmission imaging of nanostructures by an apertureless near-field optical microscope

Reda Laddada; Pierre Michel Adam; Pascal Royer; Jean Louis Bijeon

doi:10.1117/12.281196

17 September 1997 Reflection and transmission imaging of nanostructures by an apertureless near-field optical microscope

Reda Laddada, Pierre Michel Adam, Pascal Royer, Jean Louis Bijeon

Author Affiliations +

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281196
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Scanning near-field optical microscopy (SNOM) has proved to be a powerful tool to analyze and image surfaces with high lateral resolution. We report a hybrid microscope composed of a commercial atomic force microscope (AFM) and an apertureless SNOM, which operates both in reflection and transmission modes with several illumination and collection systems. The optical probe is a commercial AFM tip integrated on a silicon cantilever. The AFM is operated in the intermittent contact mode at the resonance frequency of the cantilever. We present the first images obtained on a grating of cylindrical dots of aluminum and we discus their optical origin.

Citation Download Citation

Reda Laddada, Pierre Michel Adam, Pascal Royer, and Jean Louis Bijeon "Reflection and transmission imaging of nanostructures by an apertureless near-field optical microscope", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281196

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