Electrically tunable NIR spectrometer

Kimmo Keraenen; Pentti Karioja; Outi Rusanen; Jussi Tenhunen; Martti Blomberg; Heikki Lehto

doi:10.1117/12.281225

24 September 1997 Electrically tunable NIR spectrometer

Kimmo Keraenen, Pentti Karioja, Outi Rusanen, Jussi Tenhunen, Martti Blomberg, Heikki Lehto

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281225
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.

Citation Download Citation

Kimmo Keraenen, Pentti Karioja, Outi Rusanen, Jussi Tenhunen, Martti Blomberg, and Heikki Lehto "Electrically tunable NIR spectrometer", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281225

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