High-resolution self-diffractive adaptive element for remote displacement sensing

George Eugene Dovgalenko; William T. Springer

doi:10.1117/12.281226

24 September 1997 High-resolution self-diffractive adaptive element for remote displacement sensing

George Eugene Dovgalenko, William T. Springer

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281226
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

A new conception of adaptive, high resolution, selfdiffractive microsensor for remote displacement measurements is presented. The sensor is sensitive in 3D space and can provide in-plane and out-of-plane displacements simultaneously and separately.

Citation Download Citation

George Eugene Dovgalenko and William T. Springer "High-resolution self-diffractive adaptive element for remote displacement sensing", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281226

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