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24 September 1997 Replication techniques for micro-optics
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Abstract
Materials and techniques for manufacturing replicated micro- optical elements are reviewed. Factors such as choice of material, changes in physical dimensions, feature size and cost are considered. The manufacture of a 1.5 micrometers period radial grating for a rotation encoder is described. Replicas of the grating were made from the same Ni shim by reel-to- reel UV embossing, CD injection molding and flat bed hot embossing. The dimensions of the replica parts were measured and compared. The diffraction efficiency of the UV embossed replicas was found to be only slightly less than the theoretical maximum efficiency.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas G. Harvey "Replication techniques for micro-optics", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281256
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