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24 September 1997 Simple and reusable fiber-to-chip interconnect with adjustable coupling efficiency
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Abstract
A simple, efficient and reusable fiber-to-chip interconnect is presented. The interconnect is based on a V-groove (wet- chemically etched) in silicon, combined with a loose-mode Si3N4-channel waveguide. The loose-mode waveguide is adiabatically tapered to the integrated optical (sensor) circuitry. This adiabatic taper enables the dimensions of both the integrated optical sensor circuitry and the loose- mode waveguide section to be designed independently. The coupling efficiency of the `plug-it-in' interconnect is tunable between zero and the maximum obtainable value by tightening two adjustment screws. Coupling efficiencies up to 60% using TE-polarized light at wavelength of 632.8 nm have been reproducibly measured.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rene G. Heideman and Paul V. Lambeck "Simple and reusable fiber-to-chip interconnect with adjustable coupling efficiency", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281233
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