Interface reaction characterization and interfacial effects in multilayers

Troy W. Barbee Jr.; Mark A. Wall

doi:10.1117/12.278849

11 July 1997 Interface reaction characterization and interfacial effects in multilayers

Troy W. Barbee Jr., Mark A. Wall

Proceedings Volume 3113, Grazing Incidence and Multilayer X-Ray Optical Systems; (1997) https://doi.org/10.1117/12.278849
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The performance of multilayer structures as x-ray, soft x-ray and extreme ultraviolet optics is dependent on the nature of the interfaces between constituent layers. Interfacial structure and the interaction between atoms at interfaces has also been demonstrated to have significant impact on the physical properties of multilayer materials in general and thus on their performance in other applied areas. A short summary of the approaches to characterization of interfaces in multilayer structures is presented as background. Two new techniques for the experimental evaluation of interfacial structure and interfacial structure effects are then considered and examples presented. The paper is concluded with review of these results and an assessment of their implications relative to multilayer development.

Citation Download Citation

Troy W. Barbee Jr. and Mark A. Wall "Interface reaction characterization and interfacial effects in multilayers", Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); https://doi.org/10.1117/12.278849

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