Multilayer coatings for narrowband imaging in the extreme ultraviolet

Juan I. Larruquert; Ritva A. M. Keski-Kuha

doi:10.1117/12.283794

15 October 1997 Multilayer coatings for narrowband imaging in the extreme ultraviolet

Juan I. Larruquert, Ritva A. M. Keski-Kuha

Proceedings Volume 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII; (1997) https://doi.org/10.1117/12.283794
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Multilayer coatings for narrowband imaging in the extreme ultraviolet (EUV) have been designed and prepared. Multilayers were designed to optimize reflectivity at O⁺ 83.4 nm spectral line, and simultaneously to reject radiation at 121.6 nm Lyman (alpha) hydrogen line. Al/MgF₂/Mo multilayer coatings were prepared and high reflection/suppression ratios at the above wavelengths were measured. The coatings also exhibited a dip in reflectivity at 102.6 nm Lyman (beta) . The coatings showed some slow degradation over time, but maintained a high reflection/suppression ratio after a few months. Sample cleaning was found effective in restoring a very low reflectivity at 121.6 nm for samples aged of over 100 days.

Citation Download Citation

Juan I. Larruquert and Ritva A. M. Keski-Kuha "Multilayer coatings for narrowband imaging in the extreme ultraviolet", Proc. SPIE 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, (15 October 1997); https://doi.org/10.1117/12.283794

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