Four-port Fabry-Perot/Michelson interferometer: polarization-dependent response and ellipsometry

Rasheed M. A. Azzam; M. Nazim Uddin

doi:10.1117/12.278980

3 October 1997 Four-port Fabry-Perot/Michelson interferometer: polarization-dependent response and ellipsometry

Rasheed M. A. Azzam, M. Nazim Uddin

Proceedings Volume 3121, Polarization: Measurement, Analysis, and Remote Sensing; (1997) https://doi.org/10.1117/12.278980
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The com;lex amplitude reflection and transmission coefficients for the p and s polarizations at oblique incidence are determined for a four-port solid-substrate Fabry-Perot/Michelson interferometer. The amplitude response for each of the two reflected and two transmitted waves is considered as a function of the angle of incidence and optical path length. Incidence angles for maximum back reflection and maximum back transmission are noted for both polarizations. The presence of multiple ports enables four ellipsometric functions to be measured simultaneously, which is desirable for the accurate and unambiguous characterization of deposited thin films. Results are presented for reflection and transmission ellipsometry of a growing transparent MgF₂ film on the planar entrance face of a ZnS-prism interferometer.

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Rasheed M. A. Azzam and M. Nazim Uddin "Four-port Fabry-Perot/Michelson interferometer: polarization-dependent response and ellipsometry", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); https://doi.org/10.1117/12.278980

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KEYWORDS

Polarization

Reflection

Ellipsometry

Interferometers

Thin films

Prisms

Refractive index

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