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3 October 1997Phase-shifting interferometric imaging ellipsometer
An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. Polarized light from a laser or incoherent source is collimated and reflected off of the surface under test. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The instrument uses imaging optics to image the surface under test to a CCd, yielding a truly two dimensional ellipsometric measurement. The deign of the instrument and result of measurement will be presented.
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Conrad Wells, James C. Wyant, "Phase shifting interferometric imaging ellipsometer," Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); https://doi.org/10.1117/12.283853