Phase shifting interferometric imaging ellipsometer

Conrad Wells; James C. Wyant

doi:10.1117/12.283853

Translator Disclaimer

3 October 1997 Phase-shifting interferometric imaging ellipsometer

Conrad Wells, James C. Wyant

Author Affiliations +

Proceedings Volume 3121, Polarization: Measurement, Analysis, and Remote Sensing; (1997) https://doi.org/10.1117/12.283853
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. Polarized light from a laser or incoherent source is collimated and reflected off of the surface under test. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The instrument uses imaging optics to image the surface under test to a CCd, yielding a truly two dimensional ellipsometric measurement. The deign of the instrument and result of measurement will be presented.

Citation Download Citation

Conrad Wells and James C. Wyant "Phase-shifting interferometric imaging ellipsometer", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); https://doi.org/10.1117/12.283853

ACCESS THE FULL ARTICLE