Paper
13 October 1997 Linear motion machine for soft x-ray interferometry
Robert M. Duarte, Malcolm R. Howells, Zahid Hussain, Ted Lauritzen, R. McGill, Edward J. Moler, John Spring
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© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert M. Duarte, Malcolm R. Howells, Zahid Hussain, Ted Lauritzen, R. McGill, Edward J. Moler, and John Spring "Linear motion machine for soft x-ray interferometry", Proc. SPIE 3132, Optomechanical Design and Precision Instruments, (13 October 1997); https://doi.org/10.1117/12.279100
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CITATIONS
Cited by 11 scholarly publications.
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KEYWORDS
Mirrors

Tolerancing

Beam splitters

Manufacturing

X-rays

Interferometry

Interferometers

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