Errors caused by nearly parallel optical elements in a laser Fizeau interferometer utilizing strictly coherent imaging

Erik Novak; Chiayu Ai; James C. Wyant

doi:10.1117/12.295146

1 November 1997 Errors caused by nearly parallel optical elements in a laser Fizeau interferometer utilizing strictly coherent imaging

Erik Novak, Chiayu Ai, James C. Wyant

Author Affiliations +

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.295146
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Most commercial laser Fizeau interferometers employ a rotating diffuser on an intermediate image plane. The image formed on this plane is relayed to the detector using incoherent imaging, eliminating potential interference effects from elements after the diffuser. Systems requiring high spatial frequency resolution cannot employ the diffuser or incoherent relay system to the degradation they cause to the system transfer function.With strictly coherent imaging, however, nearly parallel optical elements such as the CCD cover glass will produce interference fringes. Though these elements are common path, fringes will be visible in the phase measurements unless one of several specific conditions are met. This paper explores the theory behind the formation of these fringes and examines cases where this error may be eliminated. Theoretical calculations are compared with actual measurements taken on a laser Fizeau interferometer. The errors evident in the final phase measurements may be minimized with proper coating of the system optics, sufficient wedge in the elements, or removal of the nearly parallel elements from the system.

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Erik Novak, Chiayu Ai, and James C. Wyant "Errors caused by nearly parallel optical elements in a laser Fizeau interferometer utilizing strictly coherent imaging", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.295146

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