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3 November 1997 Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications
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We report about the diffraction efficiencies of two new types of multilayer diffraction gratings, one of them being proposed for high spectral dispersion ability due to a high line density in the photon energy range around 90 eV, while the other is being proposed as a multilayer grating working in the water window spectral range around 470 eV at near normal incidence angles. For a 6600 L/mm sinusoidal interference grating coated with 18 Mo/Si doublelayers of d = 8.2 nm absolute diffraction efficiencies up to 11 % at a wavelength .\ = 13.2 nm were measured in each first diffraction order. A 2400 L/mm laminar grating was coated with 60 Ti/C bilayers of d = 2.2 nm for high efficiency in the water window spectral range near the Ti-L edge (.\ = 2.77 nm). For a similar Ti/C multilayer mirror refiectivities of 11 % were measured at a wavelength ) = 2.7 nm and an angle of incidence a = 59 deg. First order diffraction efficiencies of about 0.7 % were measured for the Ti/C multilayer grating.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ulf Kleineberg, Hans-Juergen Stock, D. Menke, O. Wehmeyer, Ulrich Heinzmann, Detlef Fuchs, Peter Bulicke, Marco Wedowski, Gerhard Ulm, Klaus F. Heidemann, and K. Osterried "Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications", Proc. SPIE 3150, Gratings and Grating Monochromators for Synchrotron Radiation, (3 November 1997);

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