Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics

Timothy Graber; S. Felix Krasnicki; Patricia B. Fernandez; Dennis M. Mills; Qin-Yi Tong; Ulrich M. Goesele

doi:10.1117/12.294498

11 December 1997 Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics

Timothy Graber, S. Felix Krasnicki, Patricia B. Fernandez, Dennis M. Mills, Qin-Yi Tong, Ulrich M. Goesele

Proceedings Volume 3151, High Heat Flux and Synchrotron Radiation Beamlines; (1997) https://doi.org/10.1117/12.294498
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

X-ray optical elements (such as single-crystal silicon monochromators) illuminated with high-power synchrotron- radiation beams produced by insertion devices and, to a lesser extent bending magnets, require cooling. When operating a silicon crystal at room temperature, channels for the coolant are often fabricated directly beneath the diffracting surface. Then a separate silicon distribution manifold/plenum is manufactured, and the components are bonded together using an adhesive or some intermediate material. In many cases, such monochromators suffer from strains induced by the bond. A silicon-to-silicon direct- bonding technique (i.e., without any intermediate material) has been developed that appears to be an attractive method for creating a bond with less strain between two pieces of silicon. This technique is well understood for the case of thin wafers (approximately 0.5 mm thickness) and is used by the semiconductor industry. Recently, bonding of 16-mm-thick 10-cm-diameter silicon crystals has been successfully performed inducing very little strain. A short review of the silicon-to-silicon direct-bonding process will be presented with an emphasis on its application to room temperature high-heat-load x-ray optics along with the present status of direct bonding efforts at the APS.

Citation Download Citation

Timothy Graber, S. Felix Krasnicki, Patricia B. Fernandez, Dennis M. Mills, Qin-Yi Tong, and Ulrich M. Goesele "Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics", Proc. SPIE 3151, High Heat Flux and Synchrotron Radiation Beamlines, (11 December 1997); https://doi.org/10.1117/12.294498

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