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1 November 1997 Incoherent x-ray mirror surface metrology
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Abstract
In this paper we describe an x-ray long trace profiler that takes an x-ray synchrotron beam as a wavefront reference. According to results of experiments conducted on the Optics Beamline at the ESRF, this instrument allows us to measure surface slope errors with precision and accuracy better than 25 nrad (rms) and 50 nrad (rms), respectively, with a lateral resolution of 5 mm in the meridional and less than 1 mm in the sagittal direction. A very similar technique was developed to figure in situ mirrors mounted on mechanical benders into a stigmatic shape for microfocusing purposes. Micron spot sizes were achieved without difficulty and submicron precision should be possible. The technique is particularly useful if energy tunability is needed. The emphasis has been put on automation and speed of the measurement.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Olivier Hignette, Andreas K. Freund, and Elia Chinchio "Incoherent x-ray mirror surface metrology", Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); https://doi.org/10.1117/12.295559
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