Crystalline state of InSb epilayers on GaAs substrates by metalorganic chemical vapor deposition

Shuwei Li; Yongqiang Ning; Tianming Zhou; Yixin Jin; BaoLin Zhang; Hong Jiang; Yuan Tian; Guang Yuan; Fuming Jiang; Qingrui Yin; Bingyang Zhang

doi:10.1117/12.300673

20 February 1998 Crystalline state of InSb epilayers on GaAs substrates by metalorganic chemical vapor deposition

Shuwei Li, Yongqiang Ning, Tianming Zhou, Yixin Jin, BaoLin Zhang, Hong Jiang, Yuan Tian, Guang Yuan, Fuming Jiang, Qingrui Yin, Bingyang Zhang

Author Affiliations +

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300673
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

Plastic flows of a large lattice-mismatch InSb epilayer on GaAs substrate grown by metalorganic chemical vapor deposition (MOCVD) were first observed by scanning electron acoustic microscopy (SEAM), and crystalline state of the buried subsurfaces was discussed. From the SEAM images in two different positions a macroscopical heterogenous distribution of large compression stress fields was studied. It was a very important result to observe and study the plastic flows by SEAM uniquely imaging mechanism.

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Shuwei Li, Yongqiang Ning, Tianming Zhou, Yixin Jin, BaoLin Zhang, Hong Jiang, Yuan Tian, Guang Yuan, Fuming Jiang, Qingrui Yin, and Bingyang Zhang "Crystalline state of InSb epilayers on GaAs substrates by metalorganic chemical vapor deposition", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300673

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