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20 February 1998 Microstructural observation of short-wavelength recorded spots of phase-change thin film by atomic force microscopy
Liqiu Q. Men, Huiyong Liu, Fusong S. Jiang, Fuxi Gan, Jielin Sun, Minqian Li
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Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300714
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China
Abstract
GeSb2Te4 phase change thin film was prepared by rf- magnetron sputtering method. Atomic force microscopy (AFM) was used to study the micro-structure of short-wavelength recorded spots. Microarea morphology images show that the recorded domain bulge after laser irradiation. With the increasing of writing pulse width, depression appears in the center of recorded spot. It is demonstrated that AFM is a very useful tool to evaluate the recorded spots and improve the performance of phase change media.
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Liqiu Q. Men, Huiyong Liu, Fusong S. Jiang, Fuxi Gan, Jielin Sun, and Minqian Li "Microstructural observation of short-wavelength recorded spots of phase-change thin film by atomic force microscopy", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300714
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KEYWORDS
Atomic force microscopy
Thin films
Laser irradiation
Sputter deposition
Tellurium
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